VPG 800 / VPG 1400 - Heidelberg Instruments2022-08-24
Plate-to-plate overlay [3σ, nm] VPG+ 1400 250 250 300 Stitching [3σ, nm] 60 70 100 Registration [3σ, nm] 200 200 200 Write speed [mm2/min] VPG+ 800 1100 3925 7825 Write speed [mm2/min] VPG+ 1400 1125 4125 8250 System features Light source High-power DPSS laser with 355 nm Maximum substrate sizes 32″ x 32″ / 1400 x 1400 mm2
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